Demonstration of the formation of porous silicon films with superior mechanical properties, morphology and stability

Highly stable and mechanically strong thick porous silicon (PS) films have been obtained on textured silicon substrates. Porous silicon formed on textured substrates exhibits higher porosity, better mechanical strength, non-fractured surface morphology and lower stress compared to porous silicon formed on polished silicon substrates at the same current density, time of anodization and method of drying. The improved properties are attributed to the formation of localized highly porous macroscopic plastic regions. (c) 2005 Elsevier B.V. All rights reserved.