Deep-Level Characterization in GaN HEMTs-Part I: Advantages and Limitations of Drain Current Transient Measurements

被引:346
作者
Bisi, Davide [1 ]
Meneghini, Matteo [1 ]
de Santi, Carlo [1 ]
Chini, Alessandro [2 ]
Dammann, Michael [3 ]
Brueckner, Peter [3 ]
Mikulla, Michael [3 ]
Meneghesso, Gaudenzio [1 ]
Zanoni, Enrico [1 ]
机构
[1] Univ Padua, Dept Informat Engn, I-35131 Padua, Italy
[2] Univ Modena & Reggio Emilia, Dept Informat Engn, I-41125 Modena, Italy
[3] Fraunhofer Inst Appl Solid State Phys, D-79108 Freiburg, Germany
关键词
Activation energy; deep level; gallium nitride (GaN); high electron mobility transistors; traps; N-TYPE GAN; ELECTRICALLY ACTIVE DEFECTS; ELECTRON TRAPS; NONEXPONENTIAL TRANSIENTS; CURRENT COLLAPSE; ALGAN/GAN HEMTS; SURFACE-STATES; CURRENT DLTS; SPECTROSCOPY; MECHANISMS;
D O I
10.1109/TED.2013.2279021
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper critically investigates the advantages and limitations of the current-transient methods used for the study of the deep levels in GaN-based high-electron mobility transistors (HEMTs), by evaluating how the procedures adopted for measurement and data analysis can influence the results of the investigation. The article is divided in two parts within Part I. 1) We analyze how the choice of the measurement and analysis parameters (such as the voltage levels used to induce the trapping phenomena and monitor the current transients, the duration of the filling pulses, and the method used for the extrapolation of the time constants of the capture/emission processes) can influence the results of the drain current transient investigation and can provide information on the location of the trap levels responsible for current collapse. 2) We present a database of defects described in more than 60 papers on GaN technology, which can be used to extract information on the nature and origin of the trap levels responsible for current collapse in AlGaN/GaN HEMTs. Within Part II, we investigate how self-heating can modify the results of drain current transient measurements on the basis of combined experimental activity and device simulation.
引用
收藏
页码:3166 / 3175
页数:10
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