Optical metrology for very large convex aspheres - art. no. 701818

被引：15

作者：

Burge, J. H. ^{[1
]}

Su, P. ^{[1
]}

Zhao, C. ^{[1
]}

机构：

[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA

来源：

ADVANCED OPTICAL AND MECHANICAL TECHNOLOGIES IN TELESCOPES AND INSTRUMENTATION, PTS 1-3 | 2008年 / 7018卷

关键词：

Aspheres; optical fabrication; optical testing; large optics;

D O I：

10.1117/12.790063

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

Telescopes with very large diameter or with wide fields require convex secondary mirrors that may be many meters in diameter. The optical surfaces for these mirrors can be manufactured to the accuracy limited by the surface metrology. We have developed metrology systems that are specifically optimized for measuring very large convex aspheric surfaces. Large aperture vibration insensitive sub-aperture Fizeau interferometer combined with stitching software give high resolution surface measurements. The global shape is corroborated with a coordinate measuring machine based on the swing arm profilometer.

引用

页码：1818 / 1818

页数：12

共 16 条

[1]

ANDERSON DS, 1995, P SOC PHOTO-OPT INS, V2536, P169, DOI 10.1117/12.218421

[2] Stitching interferometer for large plano optics using a standard interferometer [J].

Bray, M .

OPTICAL MANUFACTURING AND TESTING II, 1997, 3134 :39-50

[3]

Burge J. H., 1993, THESIS

[4]

Burge J. H., 2007, P SPIE, V6676

[5]

BURGE JH, 1995, P SOC PHOTO-OPT INS, V2536, P127, DOI 10.1117/12.218415

[6]

BURGE JH, 1994, P SOC PHOTO-OPT INS, V2199, P181, DOI 10.1117/12.176188

[7]

Cho M.K, 2008, P SPIE, V7018

[8]

ENARD D, 2006, REPORT ELT TELESCOPE

[9]

OLIVIER SS, 2006, P SPIE, V6273

[10] MEASUREMENT OF LARGE PLANE SURFACE SHAPES BY CONNECTING SMALL-APERTURE INTERFEROGRAMS [J].

OTSUBO, M ;

OKADA, K ;

TSUJIUCHI, J .

OPTICAL ENGINEERING, 1994, 33 (02) :608-613

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