Optimized growth and integration of silica nanowires into interdigitated microelectrode structures for biosensing

被引:12
作者
Huey, Eric [1 ]
Krishnan, Subramanian [1 ]
Arya, Sunil K. [1 ,2 ]
Dey, Abhishek [1 ]
Bhansali, Shekhar [3 ]
机构
[1] Univ S Florida, Dept Elect Engn, BioMEMS & Microsyst Lab, Tampa, FL 33620 USA
[2] Inst Microelect, Bioelect Program, Singapore 117685, Singapore
[3] Florida Int Univ, Dept Elect & Comp Engn, Miami, FL 33174 USA
基金
美国国家科学基金会;
关键词
Silica nanowires; Microelectrodes; Biosensors; Vapor-liquid-solid; PSA; ELECTRONICS;
D O I
10.1016/j.snb.2011.11.056
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Single step methodology has been developed and optimized for the integration of silica nanowires in interdigitated microelectrodes network. Silica nanowires were grown directly via Vapor-Liquid-Solid (VLS) process into interdigitated microelectrodes gap. Growth optimization was performed to determine an appropriate temperature and annealing time that would allow the dense nanowire growth between interdigitated structures and not compromise the physical/electrical structure of the microelectrode devices. The results indicate the optimum integration for growth at 1050 degrees C and 60 min. Finally, electrochemical impedance spectroscopy was used to determine the viability of using these nano-micro hybrid devices for biosensing. Electrochemical impedance spectroscopy results indicate a noticeable change in charge transfer (12,609 Omega) for chips with nanowires in comparison to chips without nanowires. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:29 / 33
页数:5
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