Use of diamond-like carbon films in X-ray optics

被引：7

作者：

Kondrashov, PE ^{[1
]}

Smirnov, IS ^{[1
]}

Novoselova, EG ^{[1
]}

Baranov, AM ^{[1
]}

机构：

[1] RES INST VACUUM TECHNIQUE,MOSCOW 113105,RUSSIA

来源：

关键词：

X-ray optics; DLC films; X-ray mirrors; application;

D O I：

10.1016/S0925-9635(96)00680-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The possibility to use multilayer structures based entirely on carbon films as reflecting coatings for S-ray optics elements is analyzed. The structures grown by plasma deposition technique contained up to 100 superthin supersmooth layers. It is shown that the X-ray interference can be observed in such structures. Parameters of multilayer structures consisting of superthin carbon layers were calculated fur various wavelengths in the soft X-ray range. It is shown that the reflection coefficient of such structures is comparable to that of traditional Me/Me, Me/Si, and Me/C X-ray mirrors but the resolution is greater by a factor of 2-3. Samples of X-ray mirrors were made and their characteristics measured. (C) 1997 Elsevier Science S.A.

引用

页码：902 / 905

页数：4

共 20 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].