Metalorganic chemical vapor deposition of BaTiO3 thin film and its physical properties

被引:0
|
作者
Wang, H [1 ]
Zeng, JM [1 ]
Wang, Z [1 ]
Wang, M [1 ]
Shang, SX [1 ]
机构
[1] SHANDONG UNIV,INST CRYSTAL MAT,JINAN 250100,PEOPLES R CHINA
来源
PHOTOREFRACTIVE MATERIALS | 1996年 / 2896卷
关键词
BaTiO3; thin film; ferroelectrics; MOCVD;
D O I
10.1117/12.253243
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:264 / 266
页数:3
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