Fatigue Behavior of Electrodeposited Nanocrystalline Nickel Films

被引：8

作者：

Baek, Dong-Cheon ^{[2
]}

Lee, Soon-Bok ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, 291 Daehak Ro, Taejon, South Korea

[2] Samsung Elect Co Ltd, Qual & Reliabil, Syst LSI, Yongin, South Korea

来源：

11TH INTERNATIONAL CONFERENCE ON THE MECHANICAL BEHAVIOR OF MATERIALS (ICM11) | 2011年 / 10卷

基金：

新加坡国家研究基金会;

关键词：

nanocrystalline nickel; fatigue; rate dependancy; thin films; tensile; grain size;

D O I：

10.1016/j.proeng.2011.04.498

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Material characterization of thin film for MEMS/nano structures is a building block for the reliability assessment. One of the most significant barriers for reliable MEMS/nano structure is the long term reliability which is different from those of bulk materials. Nano-indenter has been used widely to get the elastic modulus of materials in a very simple way but other testing machines are required for tensile and endurance properties. For the long term reliability assessment of micro/nano structures, a new micro fatigue testing machine was developed to obtain the high cycles fatigue behavior of thin films. Nanocrystalline nickel thin films exhibited significant rate dependency on tensile and fatigue behavior even in room temperature due to grain size related behavior in contrast to coarse grained wrought nickels. (C) 2011 Published by Elsevier Ltd. Selection and peer-review under responsibility of ICM11

引用

页码：3006 / 3011

页数：6

共 7 条

[1]

ASTM, E808 ASTM

[2]

Baek D.-C., 2006, Fracture of Nano and Engineering Materials and Structures, P721

[3]

Freund L.B., 2003, THIN FILM MAT

[4] Grain size effects on the fatigue response of nanocrystalline metals [J].

Hanlon, T ;

Kwon, YN ;

Suresh, S .

SCRIPTA MATERIALIA, 2003, 49 (07) :675-680

[5]

Padilla HA, 2010, EXP MECH, V50, P5, DOI [10.1007/s11340-009-9301-2, 10.1007/s11340-009-9301]

[6] Softening of nanocrystalline metals at very small grain sizes [J].

Schiotz, J ;

Di Tolla, FD ;

Jacobsen, KW .

NATURE, 1998, 391 (6667) :561-563

[7] High cycle fatigue of thin silver films investigated by dynamic microbeam deflection [J].

Schwaiger, R ;

Kraft, O .

SCRIPTA MATERIALIA, 1999, 41 (08) :823-829

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