LARGE PIEZOELECTRIC EFFECT IN LOW-TEMPERATURE-SINTERED LEAD-FREE (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3 THICK FILMS

被引：7
作者：
Feng, Zuyong [1 ,2 ]
Shi, Dongqi [2 ]
Dou, Shixue [2 ]
Hu, Yihua [1 ]
Tang, Xingui [1 ]
机构：
[1] Guangdong Univ Technol, Sch Phys & Optoelect Engn, Guangzhou 510006, Guangdong, Peoples R China
[2] Univ Wollongong, Inst Superconducting & Elect Mat, N Wollongong, NSW 2500, Australia
来源：
FUNCTIONAL MATERIALS LETTERS | 2012年 / 5卷 / 03期
基金：
澳大利亚研究理事会;
关键词：
Piezoelectric properties; lead-free; thick films; low-temperature sintering; DIELECTRIC-PROPERTIES; CERAMICS;
D O I：
10.1142/S1793604712500294
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
High-quality piezoelectric (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films with dense and homogenous microstructures were fabricated at a low sintering temperature (900 degrees C) using a CuBi2O4 sintering aid. The 10 mu m thick film exhibited a high longitudinal piezoelectric constant d(33,eff) of 210 pC/N with estimated unconstrained d(33) value of 560 pC/N very close to that in the corresponding bulks. Such excellent piezoelectric effect in the low-temperature sintered (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films is comparable to the case of lead-based PZT thick films, and may be a promising application in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).
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页数：5
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