High-quality piezoelectric (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films with dense and homogenous microstructures were fabricated at a low sintering temperature (900 degrees C) using a CuBi2O4 sintering aid. The 10 mu m thick film exhibited a high longitudinal piezoelectric constant d(33,eff) of 210 pC/N with estimated unconstrained d(33) value of 560 pC/N very close to that in the corresponding bulks. Such excellent piezoelectric effect in the low-temperature sintered (Ba0.85Ca0.15)(Zr0.1Ti0.9)O-3 thick films is comparable to the case of lead-based PZT thick films, and may be a promising application in lead-free microdevices such as piezoelectric microelectromechanical systems (MEMS).
机构:
CSIC, Inst Ciencia Mat Madrid, C Sor Juana Ines de la Cruz 3, E-28049 Madrid, SpainUniv Politecn Cataluna, Dept Phys, BarcelonaTech, ES-08034 Barcelona, Spain
机构:
Daihatsu Motor Co Ltd, Res Inst Car & Life Style, Kurume, Fukuoka, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Yamanaka, Satoru
Kim, Yoonho
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Daihatsu Motor Co Ltd, Res Inst Car & Life Style, Kurume, Fukuoka, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Kim, Yoonho
Suzuki, Tsuneo
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Nagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Suzuki, Tsuneo
Baba, Masaaki
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Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Baba, Masaaki
Takeda, Masatoshi
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Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Takeda, Masatoshi
Yamada, Noboru
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Nagaoka Univ Technol, Dept Mech Engn, Nagaoka, Niigata, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Yamada, Noboru
Niihara, Koichi
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Nagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
Niihara, Koichi
Nakayama, Tadachika
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Nagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, JapanNagaoka Univ Technol, Extreme Energy Dens Res Inst, Nagaoka, Niigata 9402188, Japan
机构:
Cent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R ChinaCent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China
Ma, Jiafeng
Liu, Xinyu
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Cent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China
Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Guangxi, Peoples R ChinaCent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China
Liu, Xinyu
Zhou, Changrong
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Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Guangxi, Peoples R ChinaCent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China
Zhou, Changrong
Yuan, Changlai
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Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Guangxi, Peoples R ChinaCent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China
Yuan, Changlai
Li, Wenhua
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Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Guangxi, Peoples R ChinaCent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China
Li, Wenhua
Jiang, Minhong
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Guilin Univ Elect Technol, Sch Mat Sci & Engn, Guilin 541004, Guangxi, Peoples R ChinaCent S Univ, Sch Mat Sci & Engn, Changsha 410083, Hunan, Peoples R China