Large-aperture wide-bandwidth antireflection-coated silicon lenses for millimeter wavelengths

被引：101

作者：

Datta, R. ^{[1
]}

Munson, C. D. ^{[1
]}

Niemack, M. D. ^{[2
,3
]}

McMahon, J. J. ^{[1
]}

Britton, J. ^{[3
]}

Wollack, E. J. ^{[4
]}

Beall, J. ^{[3
]}

Devlin, M. J. ^{[5
]}

Fowler, J. ^{[3
]}

Gallardo, P. ^{[6
]}

Hubmayr, J. ^{[3
]}

Irwin, K. ^{[3
]}

Newburgh, L. ^{[7
]}

Nibarger, J. P. ^{[8
]}

Page, L. ^{[7
]}

Quijada, M. A. ^{[4
]}

Schmitt, B. L. ^{[5
]}

Staggs, S. T. ^{[7
]}

Thornton, R. ^{[9
]}

Zhang, L. ^{[7
]}

机构：

[1] Univ Michigan, Dept Phys, Ann Arbor, MI 48109 USA

[2] Cornell Univ, Dept Phys, Ithaca, NY 14853 USA

[3] Natl Inst Stand & Technol, Boulder, CO 80305 USA

[4] NASA, Goddard Space Flight Ctr, Greenbelt, MD 20771 USA

[5] Univ Penn, Dept Phys & Astron, Philadelphia, PA 19104 USA

[6] Pontificia Univ Catolica Chile, Fac Fis, Dept Astron & Astrofis, Santiago 22, Chile

[7] Princeton Univ, Dept Phys, Princeton, NJ 08544 USA

[8] Natl Inst Stand & Technol, Boulder Microfabricat Facil, Boulder, CO 80305 USA

[9] West Chester Univ Penn, Dept Phys, W Chester, PA 19383 USA

来源：

APPLIED OPTICS | 2013年 / 52卷 / 36期

基金：

美国国家科学基金会;

关键词：

SURFACE-RELIEF GRATINGS; EYE PRINCIPLE; LOSS TANGENT; PERMITTIVITY; FREQUENCIES; TELESCOPE; DESIGN; OPTICS; WINDOW; ARRAY;

D O I：

10.1364/AO.52.008747

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The increasing scale of cryogenic detector arrays for submillimeter and millimeter wavelength astrophysics has led to the need for large aperture, high index of refraction, low loss, cryogenic refracting optics. Silicon with n = 3.4, low loss, and high thermal conductivity is a nearly optimal material for these purposes but requires an antireflection (AR) coating with broad bandwidth, low loss, low reflectance, and a matched coefficient of thermal expansion. We present an AR coating for curved silicon optics comprised of subwavelength features cut into the lens surface with a custom three-axis silicon dicing saw. These features constitute a metamaterial that behaves as a simple dielectric coating. We have fabricated silicon lenses as large as 33.4 cm in diameter with micromachined layers optimized for use between 125 and 165 GHz. Our design reduces average reflections to a few tenths of a percent for angles of incidence up to 30 degrees with low cross polarization. We describe the design, tolerance, manufacture, and measurements of these coatings and present measurements of the optical properties of silicon at millimeter wavelengths at cryogenic and room temperatures. This coating and lens fabrication approach is applicable from centimeter to submillimeter wavelengths and can be used to fabricate coatings with greater than octave bandwidth. (C) 2013 Optical Society of America

引用

页码：8747 / 8758

页数：12

共 43 条

[1] MILLIMETER-WAVE COMPLEX REFRACTIVE-INDEX, COMPLEX DIELECTRIC PERMITTIVITY AND LOSS TANGENT OF EXTRA HIGH-PURITY AND COMPENSATED SILICON [J].