[1] Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
[2] Chinese Acad Sci, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[3] Shanghai Jiao Tong Univ, Natl Key Lab Micro Nano Fabricat Technol, Shanghai 200240, Peoples R China