Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement

被引：6

作者：

Zhao, XF ^{[1
]}

Suzuki, T ^{[1
]}

Masutomi, T ^{[1
]}

Sasaki, O ^{[1
]}

机构：

[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan

来源：

OPTICAL ENGINEERING | 2005年 / 44卷 / 12期

关键词：

interferometers; laser diodes; integrating buckets; charge-coupled devices; sinusoidal phase modulation; SHIFTING INTERFEROMETRY; LOOP;

D O I：

10.1117/1.2148447

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal's stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera's exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system. (c) 2005 Society of Photo-Optical Instrumentation Engineers.

引用

页数：7

共 19 条

[1]

Greivenkamp J. E., 1992, OPTICAL SHOP TESTING, P515

[2] GENERALIZED DATA REDUCTION FOR HETERODYNE INTERFEROMETRY [J].