共 28 条
[4]
PHASE-MODULATED ELLIPSOMETRY FROM THE ULTRAVIOLET TO THE INFRARED - IN-SITU APPLICATION TO THE GROWTH OF SEMICONDUCTORS
[J].
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS,
1993, 27 (01)
:1-87
[7]
INOUE M, 2006, J MAGN, V11, P195
[9]
JELLISON GE, 1990, P SOC PHOTO-OPT INS, V1166, P231, DOI 10.1117/12.962894