The Femtoprint Project

被引:57
作者
Bellouard, Y. [1 ]
Champion, A. [1 ]
Lenssen, B. [1 ]
Matteucci, M. [1 ]
Schaap, A. [1 ]
Beresna, M. [2 ]
Corbari, C. [2 ]
Gecevicius, M. [2 ]
Kazansky, P. [2 ]
Chappuis, O. [3 ]
Kral, M. [3 ]
Clavel, R. [3 ]
Barrot, F. [4 ]
Breguet, J. -M. [4 ]
Mabillard, Y. [5 ]
Bottinelli, S. [5 ]
Hopper, M. [6 ]
Hoenninger, C. [7 ]
Mottay, E. [7 ]
Lopez, J. [8 ]
机构
[1] Eindhoven Univ Technol, Dept Mech Engn, NL-5600 MB Eindhoven, Netherlands
[2] Univ Southampton, Optoelect Res Ctr, Southampton SO9 5NH, Hants, England
[3] Ecole Polytech Fed Lausanne, LSRO, Lausanne, Switzerland
[4] CSEM, Neuchatel, Switzerland
[5] Mecartex, Losone, Switzerland
[6] Quintenz Hybridtech, Neuried, Germany
[7] Amplitude Syst, Pessac, France
[8] AlphaNOV, Talence, France
来源
JOURNAL OF LASER MICRO NANOENGINEERING | 2012年 / 7卷 / 01期
关键词
Femtosecond lasers; nanogratings; optofluidics; optomechanics; photonics devices; WAVE-GUIDES WRITTEN; FEMTOSECOND-LASER; PHOTOSENSITIVE GLASS; FUSED-SILICA; FORM BIREFRINGENCE; FABRICATION; POLARIZATION; CHIP; MICROFABRICATION; GENERATION;
D O I
10.2961/jlmn.2012.01.0001
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The Femtoprint project, a European project, aims at demonstrating the use of low-energy laser pulses (i.e. below the ablation threshold) to manufacture monolithically integrated devices including optofluidic, optomechanical and photonic devices. The longer-term objective is the implementation of a versatile table-top machining center. This paper summarizes the project progress to date and demonstrates the potential of this approach through various illustrative examples. DOI: 10.2961/jlmn.2012.01.0001
引用
收藏
页码:1 / 10
页数:10
相关论文
共 46 条
[1]   Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica. [J].
Bellouard, Y ;
Said, AA ;
Bado, P .
OPTICS EXPRESS, 2005, 13 (17) :6635-6644
[2]  
Bellouard Y, 2004, MATER RES SOC SYMP P, V782, P63
[3]   Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J].
Bellouard, Y ;
Said, A ;
Dugan, M ;
Bado, P .
OPTICS EXPRESS, 2004, 12 (10) :2120-2129
[4]   On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited] [J].
Bellouard, Yves .
OPTICAL MATERIALS EXPRESS, 2011, 1 (05) :816-831
[5]   Femtosecond-laser generation of self-organized bubble patterns in fused silica [J].
Bellouard, Yves ;
Hongler, Max-Olivier .
OPTICS EXPRESS, 2011, 19 (07) :6807-6821
[6]  
Bellouard Y, 2009, ISOT: 2009 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES, P435
[7]   Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass [J].
Beresna, Martynas ;
Gecevicius, Mindaugas ;
Kazansky, Peter G. ;
Gertus, Titas .
APPLIED PHYSICS LETTERS, 2011, 98 (20)
[8]   Polarization diffraction grating produced by femtosecond laser nanostructuring in glass [J].
Beresna, Martynas ;
Kazansky, Peter G. .
OPTICS LETTERS, 2010, 35 (10) :1662-1664
[9]   Formation of radially and azimuthally polarized light using space-variant subwavelength metal stripe gratings [J].
Bomzon, Z ;
Kleiner, V ;
Hasman, E .
APPLIED PHYSICS LETTERS, 2001, 79 (11) :1587-1589
[10]   Micro/nanofactory: Concept and state of the art [J].
Breguet, JM ;
Schmitt, C ;
Clavel, R .
MICROROBOTICS AND MICROASSEMBLY II, 2000, 4194 :1-12