Effect of bottom electrode on the microstructure and electrical properties of sputtered BaTiO3 films on MgO substrates

被引：26

作者：

Zhang, Wei ^{[1
]}

Kang, Limin ^{[1
]}

Yuan, Meiling ^{[1
]}

Yang, Qian ^{[1
]}

Ouyang, Jun ^{[1
]}

机构：

[1] Shandong Univ, Key Lab Liquid Solid Struct Evolut & Proc Mat, Engn Ceram Key Lab Shandong Prov, Sch Mat Sci & Engn,Minst Educ, Jinan 250061, Shandong, Peoples R China

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2013年 / 580卷

关键词：

Ferroelectric films; BaTiO3; MgO; Electrical properties; Electrode materials; Sputtering; PULSED-LASER DEPOSITION; CHEMICAL SOLUTION DEPOSITION; PZT THIN-FILMS; FERROELECTRIC PROPERTIES; PIEZOELECTRIC PROPERTIES; DIELECTRIC-PROPERTIES; ORIENTATION DEPENDENCE; EPITAXIAL-FILMS; SINGLE-CRYSTALS; PLATINUM FILMS;

D O I：

10.1016/j.jallcom.2013.06.093

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Conductive (La0.5Sr0.5)CoO3 and Pt layers were prepared on (100)MgO substrate respectively as bottom electrode for BaTiO3 films. While the (La0.5Sr0.5)CoO3 layer showed a cube-on-cube epitaxy on MgO, thus promoting the heteroepitaxial growth of the successively grown BaTiO3 film, the Pt layer was polycrystalline with a texture highly dependent on the growth temperature. BaTiO3 films of the same thickness (similar to 320 nm) deposited on (La0.5Sr0.5)CoO3 and Pt layers with different textures were comparatively investigated. The differences in electrical properties are found to be closely related to the crystalline orientation and interface states of the BaTiO3 films on different bottom electrode layers. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：363 / 368

页数：6

共 43 条

[1] Ferroelectric and piezoelectric properties of lead-free BaTiO3 doped Bi0.5Na0.5TiO3 thin films from metal-organic solution deposition [J].

Acharya, Susant Kumar ;

Lee, Sang-Kwon ;

Hyung, Jung-Hwan ;

Yang, Yun-Ho ;

Kim, Bok-Hee ;

Ahn, Byung-Guk .

JOURNAL OF ALLOYS AND COMPOUNDS, 2012, 540 :204-209

[2] Electrical resistivity of vacuum-arc-deposited platinum thin films [J].

Avrekh, M ;

Monteiro, OR ;

Brown, IG .

APPLIED SURFACE SCIENCE, 2000, 158 (3-4) :217-222

[3] Improved electrical properties of (Pb, La)TiO3 thin films using compositionally and structurally compatible LaNiO3 thin films as bottom electrodes [J].

Bao, DH ;

Wakiya, N ;

Shinozaki, K ;

Mizutani, N ;

Yao, X .

APPLIED PHYSICS LETTERS, 2001, 78 (21) :3286-3288

[4] Crystal orientation dependence of dielectric and piezoelectric properties of tetragonal Pb(Mg1/3Nb2/3)O3-38%PbTiO3 single crystal [J].

Cao, H ;

Fang, BJ ;

Xu, HQ ;

Luo, HS .

MATERIALS RESEARCH BULLETIN, 2002, 37 (13) :2135-2143

[5] Epitaxial Ag(001) grown on MgO(001) and TiN(001): Twinning, surface morphology, and electron surface scattering [J].

Chawla, J. S. ;

Gall, D. .

JOURNAL OF APPLIED PHYSICS, 2012, 111 (04)

[6] STRUCTURAL AND ELECTRICAL-PROPERTIES OF LA0.5SR0.5COO3 EPITAXIAL-FILMS [J].

CHEUNG, JT ;

MORGAN, PED ;

LOWNDES, DH ;

ZHENG, XY ;

BREEN, J .

APPLIED PHYSICS LETTERS, 1993, 62 (17) :2045-2047

[7] Leakage current behavior of SrBi2Ta2O9 ferroelectric thin films on different bottom electrodes [J].

Das, RR ;

Bhattacharya, P ;

Katiyar, RS ;

Bhalla, AS .

JOURNAL OF APPLIED PHYSICS, 2002, 92 (10) :6160-6164

[8] INSITU GROWN YBA2CU3O7-D THIN-FILMS FROM SINGLE-TARGET MAGNETRON SPUTTERING [J].

EOM, CB ;

SUN, JZ ;

YAMAMOTO, K ;

MARSHALL, AF ;

LUTHER, KE ;

GEBALLE, TH ;

LADERMAN, SS .

APPLIED PHYSICS LETTERS, 1989, 55 (06) :595-597

[9] Size-dependent low-frequency dielectric properties in the BaTiO3/poly(vinylidene fluoride) nanocomposite films [J].

Fan, Ben-Hui ;

Zha, Jun-Wei ;

Wang, Dongrui ;

Zhao, Jun ;

Dang, Zhi-Min .

APPLIED PHYSICS LETTERS, 2012, 100 (01)

[10] Improved ferroelectric property of LaNiO3/Pb(Zr0.2Ti0.8)O3/LaNiO3 capacitors prepared by chemical solution deposition on platinized silicon -: art. no. 092902 [J].

Han, H ;

Zhong, J ;

Kotru, S ;

Padmini, P ;

Song, XY ;

Pandey, RK .

APPLIED PHYSICS LETTERS, 2006, 88 (09)

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