Measuring Geometric Parameters of a High-Power Infrared Laser Beam near the Focus for Applications in a Laser-Plasma Short-Wave Radiation Source

被引：1

作者：

Belashov, A. V. ^{[1
]}

Butorin, P. S. ^{[1
]}

Zadiranov, Yu. M. ^{[1
]}

Kalmykov, S. G. ^{[1
]}

Maximov, V. A. ^{[1
]}

Sasin, M. E. ^{[1
]}

Serdobintsev, P. Yu. ^{[2
,3
]}

机构：

[1] Ioffe Inst, St Petersburg 197101, Russia

[2] Peter Great St Petersburg Polytech Univ, St Petersburg 197101, Russia

[3] St Petersburg Univ, St Petersburg 199034, Russia

来源：

OPTICS AND SPECTROSCOPY | 2020年 / 128卷 / 08期

基金：

俄罗斯基础研究基金会;

关键词：

laser plasma; laser; focus; caustic surface; waist; ablation;

D O I：

10.1134/S0030400X2008007X

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Measurements of geometric parameters of a high-power infrared laser beam have been realized by three methods. The obtained results are in a satisfactory agreement with each other. When focusing the beam with wavelength of 1.064 mu m with a specially designed non-aberrational objective, a focal spot of approximately 40 mu m diameter could be obtained, with the waist length being 230-280 mu m. The measured parameters give an idea of the size of a laser plasma generated by this beam on a Xe gas microjet.

引用

页码：1338 / 1341

页数：4

共 3 条

[1] Measuring Geometric Parameters of a High-Power Infrared Laser Beam near the Focus for Applications in a Laser-Plasma Short-Wave Radiation Source
A. V. Belashov
P. S. Butorin
Yu. M. Zadiranov
S. G. Kalmykov
V. A. Maximov
M. E. Sasin
P. Yu. Serdobintsev
Optics and Spectroscopy, 2020, 128 : 1338 - 1341
[2] High-power compact laser-plasma source for x-ray lithography
Gaeta, CJ
Rieger, H
Turcu, ICE
Forber, RA
Campeau, SM
Cassidy, KL
Powers, MJ
Maldonado, JR
French, G
Naungayan, J
Kelsey, C
Hark, P
Morris, JH
Foster, RM
Smith, HI
Lim, MH
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (6B): : 4111 - 4121
[3] A high-power short-pulse laser for EUV source generation using laser produced plasma and achieving low cost of ownership
Comley, AJ
Ellwi, S
Hay, N
Brownell, M
HIGH-POWER LASER ABLATION V, PTS 1 AND 2, 2004, 5448 : 712 - 721

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