共 21 条
[4]
Capacitive flexible pressure sensor: microfabrication process and experimental characterization
[J].
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
2016, 22 (03)
:465-471
[6]
A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications
[J].
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
2017, 23 (06)
:1847-1852
[8]
Kwon D, 2015, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), P299, DOI 10.1109/TRANSDUCERS.2015.7180920
[10]
Mannsfeld SCB, 2010, NAT MATER, V9, P859, DOI [10.1038/NMAT2834, 10.1038/nmat2834]