Synthesis of Nano-Structured Metal-Oxides and Deposition via Ink-Jet Printing on Microhotplate Substrates

被引:3
作者
Andio, Mark A. [1 ]
Beach, Elvin R. [2 ]
Morris, Patricia A. [1 ]
Akbar, Sheikh A. [1 ]
机构
[1] Ohio State Univ, Dept Mat Sci & Engn, Columbus, OH 43210 USA
[2] Battelle Mem Inst, Columbus, OH 43210 USA
关键词
Ink-Jet Printing; Microhotplate; Metal-Oxide; Suspension Formulation; Nanoparticle; NONAQUEOUS SYNTHESIS; THIN-FILMS; GAS; NANOPARTICLES; NANOSTRUCTURES;
D O I
10.1166/sam.2011.1208
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Ink-jet printing was used to deposit metal-oxide nanoparticle suspensions onto microhotplate platforms (Microhotplates are miniaturized devices which include an integrated heater and electrodes with a spacing of 150 mu m). Hydrothermal and solvothermal synthesis methods were used to create various metal-oxide nanoparticles with particle sizes below 50 nm. Nano-structured materials, sometimes referred to as hierarchical structures, were also produced using hydrothermal synthesis techniques. The oxide nanoparticles were made into aqueous suspensions for deposition via an ink-jet printer. The liquid components of the suspension were formulated to control the rheological properties and drying rate of the suspension. The microstructure of the dried metal-oxide nanoparticle film was analyzed by scanning electron microscopy, and showed that the resulting film was agglomerate free. Baseline resistance measurements as a function of temperature for three tin dioxide (SnO2) nanoparticle films on microhotplate substrates are also presented.
引用
收藏
页码:845 / 852
页数:8
相关论文
共 32 条
[1]   Batch fabrication of metal oxide sensors on micro-hotplates [J].
Barborini, E. ;
Vinati, S. ;
Leccardi, M. ;
Repetto, P. ;
Bertolini, G. ;
Rorato, O. ;
Lorenzelli, L. ;
Decarli, M. ;
Guarnieri, V. ;
Ducati, C. ;
Milani, P. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (05)
[2]   Solvothermal synthesis of crystalline nickel oxide nanoparticles [J].
Beach, Elvin R. ;
Shqau, Krenar ;
Brown, Samantha E. ;
Rozeveld, Steven J. ;
Morris, Patricia A. .
MATERIALS CHEMISTRY AND PHYSICS, 2009, 115 (01) :371-377
[3]   Integration of nanostructured materials with MEMS microhotplate platforms to enhance chemical sensor performance [J].
Benkstein, Kurt D. ;
Martinez, Carlos J. ;
Li, Guofeng ;
Meier, Douglas C. ;
Montgomery, Christopher B. ;
Semancik, Steve .
JOURNAL OF NANOPARTICLE RESEARCH, 2006, 8 (06) :809-822
[4]  
Derby B., 2000, ANNU REV MATER SCI, V40, P395
[5]  
Derby B., 2003, MRS BULL, V28, P815
[6]   Nonaqueous synthesis of metal oxide nanoparticles: Short review and doped titanium dioxide as case study for the preparation of transition metal-doped oxide nanoparticles [J].
Djerdj, Igor ;
Arcon, Denis ;
Jaglicic, Zvonko ;
Niederberger, Markus .
JOURNAL OF SOLID STATE CHEMISTRY, 2008, 181 (07) :1571-1581
[7]   Metal and metal oxide nanoparticles in chemiresistors: Does the nanoscale matter? [J].
Franke, ME ;
Koplin, TJ ;
Simon, U .
SMALL, 2006, 2 (01) :36-50
[8]   Microfabricated gas sensor systems with sensitive nanocrystalline metal-oxide films [J].
Graf, M. ;
Gurlo, A. ;
Barsan, N. ;
Weimar, U. ;
Hierlemann, A. .
JOURNAL OF NANOPARTICLE RESEARCH, 2006, 8 (06) :823-839
[9]   Development of ultrafine indium tin oxide (ITO) nanoparticle for ink-jet printing by low-temperature synthetic method [J].
Hong, Sung-Jei ;
Kim, Yong-Hoon ;
Han, Jeong-In .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2008, 7 (02) :172-176
[10]   Nanoparticle metal-oxide films for micro-hotplate-based gas sensor systems [J].
Ivanov, P ;
Stankova, M ;
Llobet, E ;
Vilanova, X ;
Brezmes, J ;
Gràcia, I ;
Cané, C ;
Calderer, J ;
Correig, X .
IEEE SENSORS JOURNAL, 2005, 5 (05) :798-809