Three-face step-diagonal measurement method for the estimation of volumetric positioning errors in a 3D workspace

被引：9

作者：

Bui, Chinh B. ^{[1
,2
]}

Hwang, Jooho ^{[1
,2
]}

Lee, Chan-Hong ^{[1
]}

Park, Chun-Hong ^{[1
]}

机构：

[1] Korea Inst Machinery & Mat, Dept Ultraprecis Machines & Syst, Taejon 305343, South Korea

[2] Korea Univ Sci & Technol, Dept Nanomechatron, Taejon 305333, South Korea

来源：

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 2012年 / 60卷

关键词：

Step-diagonal measurement; Volumetric positioning error; Motion error;

D O I：

10.1016/j.ijmachtools.2012.03.005

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, it is demonstrated that volumetric positioning errors can be calculated by measuring the displacements of three face step-diagonals and three additional linear positions. The three-face step-diagonal tests are used in combination with three directly measured linear errors to estimate nine errors in a three-dimensional workspace, including six straightness motion errors and three perpendicular errors. These errors in the workspace were also directly measured to evaluate the estimated errors. The maximum difference between estimated and measured errors was 0.45 mu m for the straightness errors, 2.8 mu rad for the perpendicular errors. Moreover, in practice, the three-face step-diagonal method is easier and faster than direct measurement along each axis and more convenient than the conventional step-diagonal technique. Hence, this method is suitable for industrial applications. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：40 / 43

页数：4

共 10 条

[1]

[Anonymous], 2002, 23062002 ISO

[2] Limitations of lager diagonal measurements [J].

Chapman, MA .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2003, 27 (04) :401-406

[3] A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways [J].

Hwang, Jooho ;

Park, Chun-Hong ;

Gao, Wei ;

Kim, Seung-Woo .

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2007, 47 (7-8) :1053-1058

[4] Estimation and correction method for the two-dimensional position errors of a planar XY stage based on motion error measurements [J].

Hwang, Jooho ;

Park, Chun-Hong ;

Lee, Chan-Hong ;

Kim, Seung-Woo .

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2006, 46 (7-8) :801-810

[5] A new formulation of laser step diagonal measurement-Three-dimensional case [J].

Ibaraki, Soichi ;

Hata, Takafumi .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2010, 34 (03) :516-525

[6] A new formulation of laser step-diagonal measurement-two-dimensional case [J].

Ibaraki, Soichi ;

Hata, Takafumi ;

Matsubara, Atsushi .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2009, 33 (01) :56-64

[7] Testing the diagonal measuring technique [J].

Svoboda, O .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2006, 30 (02) :132-144

[8]

Tanaka H, 1981, CIRP Annals, V30, P455

[9] A NEW METHOD FOR THE MEASUREMENT OF THE STRAIGHTNESS OF MACHINE-TOOLS AND MACHINED WORK [J].

TOZAWA, K ;

SATO, H ;

OHORI, M .

JOURNAL OF MECHANICAL DESIGN-TRANSACTIONS OF THE ASME, 1982, 104 (03) :587-592

[10] Laser vector measurement technique for the determination and compensation of volumetric positioning errors. Part I: Basic theory [J].

Wang, C .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (10) :3933-3937

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