Multilayer graphene nanobelts on SWCNT films for high current interconnect applications

被引：1

作者：

Rackauskas, Simas ^{[1
,2
]}

Rackauskas, Tatiana ^{[3
]}

Alaferdov, Andrei ^{[3
]}

Vaz, Alfredo ^{[3
]}

Savu, Raluca ^{[3
]}

Moshkalev, Stanislav A. ^{[3
]}

机构：

[1] Kaunas Univ Technol, Dept Phys, Studentu St 50, LT-51368 Kaunas, Lithuania

[2] Kaunas Univ Technol, Inst Mat Sci, K Barsausko St 59, LT-51423 Kaunas, Lithuania

[3] Univ Estadual Campinas, CCSNano, BR-13083870 Campinas, SP, Brazil

来源：

NANOTECHNOLOGY | 2019年 / 30卷 / 24期

关键词：

multilayer graphene; nanobelts; single-walled carbon nanotubes; high current interconnects; contact resistance; LIQUID-PHASE EXFOLIATION; CARBON; CONDUCTIVITY; TRANSPORT; LAYER;

D O I：

10.1088/1361-6528/ab083f

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this work we propose multilayer graphene (MLG) nanobelts for high current interconnections with single wall carbon nanotubes (SWCNT) and compare these with metal contacts. MLG contacts were directly printed on the SWCNT, without any additional metal parts, demonstrating the possibility to use these materials as interconnections in microelectronics. Different work function metals Al, Ti and Pd were probed for the lowest contact resistance with the SWCNT. Ti contacts demonstrated the best results among the metals owing to its work function being closest to the SWCNT and therefore giving the lowest Schottky barrier. Even though Ti contacts show the lowest contact resistance, the current density for MLG contacts was higher, giving the best results for high current interconnection applications. Moreover, MLG contacts show a stable and repeatable resistance decrease under high current conditions. Heat treatment of the MLG and metal contacts was completed in vacuum, in order to further reduce the contact resistance and optimal heat treatment conditions were found at 600 degrees C.

引用

页数：8

共 53 条

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