A High Performance Microwave Equalizer Based on MEMS Technology

The theory, design, fabrication and measurements of a MEMS equalizer for adjusting the microwave signals are presented. The novelty of the equalizer is the CPW line with released signal and ground sections based on the MEMS technology. In this method the work frequency can be achieved higher and the minimal insertion losses can be greatly reduced due to the dielectric losses. The MEMS equalizer is fabricated by MetalMUMPs process. The experimental results show that reflection losses of the MEMS equalizer are below -17dB at the whole frequency range, the minimal insertion losses are around 1dB at 21GHz frequency point and the maximal insertion losses are around 2.7dB at 26.8GHz frequency point. The experimental results agree well with the theory and the simulation.