Design and fabrication of silicon bulk micromachined optical scanner for medical application

被引：0
|
作者：
Nakada, M. [1 ,2 ]
Chong, C. [3 ]
Isamoto, K. [3 ]
Morosawa, A. [3 ]
Fujita, H. [1 ]
Toshiyoshi, H. [1 ,2 ]
机构：
[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan
[2] Kanagawa Acad Sci & Technol, Kawasaki, Kanagawa 2130012, Japan
[3] Santec Corp, Komaki, Aichi 4850802, Japan
来源：
IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3 | 2007年
关键词：
D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A silicon micromachined electrostatic optical scanner has been developed by using the comb-drive electrostatic mechanism, and a prototype assembly of miniaturized fiber-optic endoscope was developed. Energy for electrostatically control the scanner was optically transmitted through the single mode fiber, and drive voltage was generated by the co-located photo-voltaic cell.
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页码：1395 / +
页数：2
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