AlGaInN violet laser diodes grown on GaN substrates with low aspect ratio

被引:16
作者
Ito, S [1 ]
Yamasaki, Y [1 ]
Omi, S [1 ]
Takatani, K [1 ]
Kawakami, T [1 ]
Ohno, T [1 ]
Ishida, M [1 ]
Ueta, Y [1 ]
Yuasa, T [1 ]
Taneya, M [1 ]
机构
[1] Sharp Co Ltd, Devices Technol Res Labs, Tenri, Nara 6328567, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 01期
关键词
GaN; AlGaInN; laser diode; radiation angle; aspect ratio;
D O I
10.1143/JJAP.43.96
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlGaInN violet laser diodes grown on GaN substrates have been studied. Waveguide simulations have been performed and perpendicular radiation angles have been investigated. A peculiar layer structure has been proposed to reduce the perpendicular radiation angle and compared with a conventional laser. The laser structure has an n-cladding layer consisting of three AlGaN films, the middle film of which has relatively high Al composition. A laser diode with an optimized structure has been fabricated. The threshold current density and slope efficiency have been 2.9 kA/cm(2) and 1.4 W/A, respectively. The perpendicular radiation angle has been as small as 16.2degrees. The AlGaInN violet laser diode with a low aspect ratio of 1.6 and a small threshold current of 29 mA has been realized.
引用
收藏
页码:96 / 99
页数:4
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