Simulation demonstration and experimental fabrication of a multiple-slot waveguide

被引：16

作者：

Tu, Xiaoguang ^{[1
]}

Xu, Xuejun ^{[1
]}

Chen, Shaowu ^{[1
]}

Yu, Jinzhong ^{[1
]}

Wang, Qiming ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2008年 / 20卷 / 5-8期

基金：

中国国家自然科学基金;

关键词：

dielectric waveguides; silicon-on-insulator technology;

D O I：

10.1109/LPT.2007.915619

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A multiple-slot waveguide is presented and demonstrated through theoretical simulation. Taking a double-slot waveguide as an example, the results show a nearly 30% enhancement of optical intensity compared with the traditional single-slot waveguide with the same slot gap width. Therefore, the E-field intensity of the slot can be increased by adding another smaller slot. A double-slot waveguide with oxide and air as low index slot materials is realized experimentally and the formation processes of the slots are analyzed.

引用

页码：333 / 335

页数：3

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