Infrared wire-grid polarizer with sol-gel antireflection films on both sides

被引：0
作者：
Yamada, Itsunari [1 ,2 ]
Ishihara, Yoshiro [1 ]
机构：
[1] Univ Shiga Prefecture, Sch Engn, Dept Elect Syst Engn, Hikone, Shiga 5228533, Japan
[2] Univ Shiga Prefecture, Sch Engn, Ctr Glass Sci & Technol, Hikone, Shiga 5228533, Japan
来源：
PHOTONICS, DEVICES, AND SYSTEMS VII | 2017年 / 10603卷
关键词：
infrared wire-grid polarizer; sol-gel method; imprint process; antireflective coating; FABRICATION; NANOPATTERNS; GRATINGS; ARRAY; UV;
D O I：
10.1117/12.2288835
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated an infrared wire-grid polarizer with the high transverse magnetic (TM) polarization transmittance and high extinction ratio by soft imprint lithography, sol-gel method, and Al shadow coating processes. A zilconia film was coated on Si substrate by using sol-gel method and spin coating method. Then, sol-gel zirconia grating was formed on the back side using imprinting using a silicone mold. The polarizer was produced by depositing Al obliquely on the grating. The TM transmittance of the fabricated element was greater than 80% at a wavelength of 4.8 mu m. The sol-gel zilconia films acted as antireflection films. The extinction ratio exceeded 26 dB at its wavelength.
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页数：7
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