Influences of bias voltage on properties of TiAl-doped DLC coatings synthesized by cathodic arc evaporation

被引:32
作者
Chang, CL
Jao, JY
Chang, TC
Ho, WY
Wang, DY
机构
关键词
diamond-like carbon film; tribology; cathodic arc evaporation;
D O I
10.1016/j.diamond.2005.06.034
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, the combinations of TiAl-doped DLC (Diamond-like Carbon) and TiAlN/TiN double-layered films were designed to deposit oil the tool steels using cathodic arc evaporation in a single process. The economic advantage in depositing the combined coating in one production scale PVD coating system is of practical importance. The TiAl-doped DLC as lubricant coatings were synthesized with TiAl-target are sources to emit ion plasma to activate acetylene reactive gases. Scanning electron microscopy (SEM), Auger electron spectroscopy (AES), micro-Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) techniques were employed to analysis the microstructure properties of TiAl-doped DLC coatings. Vicker's and tribometer tester were used to measure the mechanical properties of TiAl-doped DLC coatings. The results show that the TiAl-doped DLC coatings retained lower friction coefficient at approximately 0.15 during the steady state sliding. The lubricity and wear resistance of TiAl-doped DLC coatings is then demonstrated to potentially be applied to the cutting tools with no lubricants. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:2127 / 2132
页数:6
相关论文
共 26 条
[1]   Multilayer coatings for improved performance [J].
Bull, SJ ;
Jones, AM .
SURFACE & COATINGS TECHNOLOGY, 1996, 78 (1-3) :173-184
[2]  
CHANG CL, 2004, 1 INT C ADV TRIB I C
[3]   Catalysis effect of metal doping on wear properties of diamond-like carbon films deposited by a cathodic-arc activated deposition process [J].
Chang, YY ;
Wang, DY ;
Wu, WT .
THIN SOLID FILMS, 2002, 420 :241-247
[4]   New hard/lubricant coating for dry machining [J].
Derflinger, V ;
Brändle, H ;
Zimmermann, H .
SURFACE & COATINGS TECHNOLOGY, 1999, 113 (03) :286-292
[5]   XPS characterization of the interface between low dielectric constant amorphous fluoropolymer film and evaporation-deposited aluminum [J].
Ding, SJ ;
Zhang, QQ ;
Zhang, DW ;
Wang, JT ;
Zhou, YD ;
Lee, WW .
APPLIED SURFACE SCIENCE, 2001, 178 (1-4) :140-148
[6]   Interpretation of Raman spectra of disordered and amorphous carbon [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107
[7]   Improvement of 'duplex' PVD coatings for HSS cutting tools by PFPE (perfluorpolyether 'Z-DOL') [J].
Fox-Rabinovich, GS ;
Kovalev, AI ;
Wainstein, DL ;
Shuster, LS ;
Dosbaeva, GK .
SURFACE & COATINGS TECHNOLOGY, 2002, 160 (01) :99-107
[8]   Mechanical behaviour of hard PVD multilayered coatings [J].
Harry, E ;
Ignat, M ;
Pauleau, Y ;
Rouzaud, A ;
Juliet, P .
SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3) :185-189
[9]  
Holleck H, 1995, SURF COAT TECH, V76, P328, DOI 10.1016/0257-8972(95)02555-3
[10]   Direct evaluation of the sp3 content in diamond-like-carbon films by XPS [J].
Merel, P ;
Tabbal, M ;
Chaker, M ;
Moisa, S ;
Margot, J .
APPLIED SURFACE SCIENCE, 1998, 136 (1-2) :105-110