Reaction Mechanism Underlying Atomic Layer Deposition of Antimony Telluride Thin Films

The mechanism underlying the deposition of SbTe films by alternating exposures to Sb(NMe2)(3) and Te(GeMe3)(2) was investigated. Sb(NMe2)(3) and Te(GeMe3)(2) were selected because they have very high vapor pressure and are free of Si, Cl, and O atoms in the molecules. The mechanism of deposition was proposed by density functional theory (DFT) calculation and was verified by in-situ quartz crystal microbalance (QCM) analysis. DFT calculation expected the ligand-exchange reactions between the Sb and Te precursors to form Me2NGeMe3 as the byproduct. QCM analysis indicated that a single -NMe2 group in Sb(NMe2)(3) reacts with -TeGeMe3 on the surface to form an Sb2Te3 film, and that a small fraction of Sb is incorporated into the film by the thermal decomposition of Sb(NMe2)(3). The Te(GeMe3)(2) molecules were thermally stable up to 120 degrees C, while the Sb(NMe2)(3) molecules decomposed at temperatures of 60 degrees C and higher. Sb-rich SbTe films with different Sb contents were prepared by controlling the partial decomposition of Sb(NMe2)(3) molecules, which was enhanced by increasing the pulse time of the precursor.