Electrohydrodynamic Injection Micropump With Composite Gold and Single-Walled Carbon Nanotube Electrodes

被引:5
作者
Russel, M. Kamrul [1 ]
Selvaganapathy, P. Ravi [1 ]
Ching, Chan Y. [1 ]
机构
[1] McMaster Univ, Dept Mech Engn, Hamilton, ON L8S 4L7, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
Electrohydrodynamics; micropumps; nano features; single wall carbon nanotubes; ELECTROSTATIC AIR CLEANERS; ION DRAG PUMP; DIELECTRIC LIQUIDS; FIELD-EMISSION; EHD PUMP; CONDUCTION; FABRICATION; SURFACE; PERFORMANCE; GENERATION;
D O I
10.1109/JMEMS.2015.2421641
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The presence of microfeatures/nanofeatures with sharp asperities on the emitter electrodes of ion drag electrohydrodynamic (EHD) micropumps is likely to enhance the local electric field and charge injection significantly, and thus the pressure generation and flow rates. The objective of this paper is to investigate the performance of EHD micropumps with single-walled carbon nanotubes (SWCNT) on the emitter electrodes. The micropumps had 100 pairs of planar electrodes where the width of the emitter and collector electrodes was 20 and 40 mu m, respectively, with a cross-sectional domain of 100 mu m x 5 mm. Two micropumps with interelectrode spacing of 120 and 40 mu m were tested with a smooth emitter surface, and where SWCNT were electrophoretically deposited on the emitter electrodes using HFE7100 as the working fluid. The threshold voltage for charge injection lowered by a factor of 3 and 1.4 for the two pumps with SWCNT on the emitter electrodes compared with the smooth electrode case. The corresponding static pressure head increased by a factor 5, while the flow rate at no external back pressure increased by a factor 3 for the pump with interelectrode spacing of 120 mu m. For the pump with interelectrode spacing of 40 mu m, a maximum static pressure of 4.7 kPa was achieved at 900 V with SWCNT on the emitter electrode. [2014-0308]
引用
收藏
页码:1557 / 1564
页数:8
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