Self-Limiting Chemical Vapor Deposition Growth of Monolayer Graphene from Ethanol

被引:93
|
作者
Zhao, Pei [1 ]
Kumamoto, Akihito [2 ]
Kim, Sungjin [1 ]
Chen, Xiao [1 ]
Hou, Bo [1 ]
Chiashi, Shohei [1 ]
Einarsson, Erik [1 ,3 ]
Ikuhara, Yuichi [2 ]
Maruyama, Shigeo [1 ]
机构
[1] Univ Tokyo, Dept Mech Engn, Bunkyo Ku, Tokyo 1138656, Japan
[2] Univ Tokyo, Inst Engn Innovat, Bunkyo Ku, Tokyo 1138656, Japan
[3] Univ Tokyo, Global Ctr Excellence Mech Syst Innovat, Bunkyo Ku, Tokyo 1138656, Japan
来源
JOURNAL OF PHYSICAL CHEMISTRY C | 2013年 / 117卷 / 20期
关键词
SINGLE-CRYSTAL GRAPHENE; LARGE-AREA; COPPER FOILS; EPITAXIAL GRAPHENE; BILAYER GRAPHENE; HIGH-QUALITY; THIN-FILMS; CU; INSTABILITY; DIFFUSION;
D O I
10.1021/jp400996s
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Using low-pressure chemical vapor deposition (LPCVD), we, for the first time, realize the self-limiting growth behavior of monolayer graphene on commercially available electroplated copper foils from a carbon precursor other than methane, and systematically investigate the growth of graphene from ethanol and compare its self-limiting behavior over copper facets with different identities. Results show that the growth of graphene from ethanol in the LPCVD process is a substra-temediated process, in which the domains of graphene are determined by the lattice axes on the copper facets. Moreover, during the evolution of the domains, low-index copper facets of Cu(111) and Cu(100) play a critical role in the following self-limiting process of a continuous graphene sheet, whereas the Cu(110) and high-index facets favor nucleation and formation of secondary layers. In addition, a high degree of similarity exists between graphene grown from ethanol and methane, showing that, when the carbon flux is sufficiently low, the self-limiting growth of graphene on copper surfaces using LPCVD is independent of the precursor structure of ethanol and methane.
引用
收藏
页码:10755 / 10763
页数:9
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