Low Coherence Interferometric System for MEMS/MOEMS Testing

被引：0
|
作者：
Pakula, A. [1 ]
Salbut, L. [1 ]
机构：
[1] Warsaw Univ Technol, Inst Micromech & Photon, Warsaw, Poland
来源：
MECHATRONICS: RECENT TECHNOLOGICAL AND SCIENTIFIC ADVANCES | 2011年
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D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Low Coherence Interferometry (LCI) known also as White Light Interferometry (WLI) is a useful tool for vast range of specimen characterization especially for MEMS/MOEMS testing [1,2]. In the paper specially design laboratory interferometric setup, together with examples of various objects characterized by it, is presented.
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页码：777 / 784
页数：8
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