Plasma resistance of addition-cure liquid silicone rubber with Ureido-attached MQ silicone resin

Ureido-attached MQ silicone resin (U-MQ) was synthesized and added into addition-cure liquid silicone rubber (ALSR) for the improvement of the plasma resistance. The morphology and chemical structure of the surface of ALSR/U-MQ after plasma treatment were characterized by scanning electron microscopy-energy dispersive Xray spectroscopy (SEM-EDS), X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy-attenuated total reflectance (FTIR-ATR), and the water contact angles (WCAs) of the surface at different recovery time were also measured. The results indicated that the surface of ALSR/U-MQ was slightly destroyed after plasma treatment, exhibiting excellent plasma resistance. Furthermore, the increasing rate of WCAs of ALSR with U-MQ kept faster than that of ALSR without U-MQ at different recovery time after plasma treatment, also demonstrating the lower destruction degree of ALSR/U-MQ. It was possible that inorganic ceramic layer was gradually formed on the surface of ALSR/U-MQ under plasma treatment, which was beneficial to protect the inner matrix from serious destruction.