Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study

被引：16

作者：

Nili, Hussein ^{[1
]}

Cheng, Guang ^{[2
]}

Venkatesh, T. A. ^{[2
]}

Sriram, Sharath ^{[1
]}

Bhaskaran, Madhu ^{[1
]}

机构：

[1] RMIT Univ, Funct Mat & Microsyst Res Grp, Melbourne, Vic 3001, Australia

[2] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA

来源：

MATERIALS LETTERS | 2013年 / 90卷

基金：

澳大利亚研究理事会;

关键词：

Thin films; Piezoelectric response; Nanoindentation; Elastic modulus; Instrumented indentation method (IIM); ZIRCONATE-TITANATE CERAMICS; PLASTIC PROPERTIES; NANOINDENTATION; INDENTATION; ENERGY; TEMPERATURE; SENSITIVITY; ORIENTATION; SHARP;

D O I：

10.1016/j.matlet.2012.09.036

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Piezoelectric materials perform mechanical-to-electrical energy conversion and have unique and enhanced properties, particularly in the thin film form. In this work, the nanomechanical properties of strontium-doped lead zirconate titanate thin films are investigated by nanoindentation. Finite element modeling of the nanoindentation process allows for a comparison of the simulated and experimentally measured load-displacement curves. New insights correlating the nanomechanical and piezoelectric properties of thin films have been obtained which will enable more efficient design of piezoelectric energy harvesting devices. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：148 / 151

页数：4

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