CD changes of 193 nm resists during SEM measurement

CD linewidth change during SEM inspection has been one of the issues encountered in the introduction of 193 rim resists. As a general tendency, the methacrylate resists exhibit faster line width reduction than the cycloolefin-maleic anhydride (COMA) systems; however, other resist components as well as CD SEM settings play an important role. Based on the exposure time vs. CD loss, the line width slimming (LWS) is found to proceed in three steps, which are assigned as: (1) chemical change of outer resist layer, (2) evaporation of volatiles and (3) bulk chain scission or deprotection. Countermeasures for CD degradation are proposed from both the formulation and process sides. A calculation of e-beam penetration depth suggests that deprotection, chain scission and other reactions occur in the first 2040 run, and these reaction rates combined with thermal effects determine LWS. The CD SEM measurement method has been improved to minimize e-beam exposure and to spread out the thermal load over a larger period of time. An optimized formulation exhibits less than 0.2% LWS per measurement with the improved CD measurement program.