Characterisation of RF-sputtered platinum films from industrial production plants using slow positrons

被引:8
作者
Osipowicz, A [1 ]
Härting, M
Hempel, M
Britton, DT
Bauer-Kugelmann, W
Trifthäuser, W
机构
[1] Fachhsch Fulda, Fak Elektrotech, D-36039 Fulda, Germany
[2] Univ Cape Town, Dept Phys, ZA-7701 Rondebosch, South Africa
[3] Univ Bundeswehr Munchen, Inst Nukl Festkorperphys, D-85577 Neubiberg, Germany
关键词
Pt thin films; positron lifetime; Doppler-broadening; industrial production;
D O I
10.1016/S0169-4332(99)00200-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Platinum films, used in thin film technology, produced by radio-frequency sputter deposition on aluminium oxide substrates under different conditions, have been studied by positron beam and other techniques, before and after production annealing. The defect structure in the layers has been characterised using both positron Lifetime and Doppler-broadening spectroscopy, and compared with X-ray studies of crystallinity and texture. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:198 / 203
页数:6
相关论文
共 14 条
  • [1] Brandt W., 1983, POSITRON SOLID STATE
  • [2] A Southern African positron beam
    Britton, DT
    Harting, M
    Teemane, MRB
    Mills, S
    Nortier, FM
    VanderWalt, TN
    [J]. APPLIED SURFACE SCIENCE, 1997, 116 : 53 - 58
  • [3] POSITRON-ANNIHILATION STUDY OF THE TEMPERATURE BEHAVIOR OF SOLID KRYPTON DEPOSITS IN COPPER
    BRITTON, DT
    RICEEVANS, PC
    EVANS, JH
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1987, 55 (03): : 347 - 357
  • [4] APPLICATION OF TIME-DEPENDENT DIFFUSION-MODELS TO THE STUDY OF REAL SOLIDS
    BRITTON, DT
    STOMER, J
    [J]. APPLIED SURFACE SCIENCE, 1995, 85 (1-4) : 1 - 7
  • [5] THIN-FILM PLATINUM RESISTANCE THERMOMETERS - CALIBRATION AND MATHEMATICAL-DESCRIPTION OF T(R) FUNCTION
    DIMITROV, DA
    ZAHARIEV, AL
    GEORGIEV, JK
    KOLEV, GA
    PETRINSKI, JN
    IVANOV, T
    [J]. CRYOGENICS, 1994, 34 (06) : 487 - 489
  • [6] Evans W. D. J., 1981, PLATIN MET REV, V25, P2
  • [7] PENFOLD AS, 1995, HDB THIN FILM PROCES
  • [8] PREPARATION OF A PT-GAAS SCHOTTKY CONTACT BY ION PLATING
    PETO, G
    ANDERSSON, T
    [J]. SOLID-STATE ELECTRONICS, 1991, 34 (06) : 591 - 592
  • [9] ROHELIA RS, 1991, METHODS MAT, V38, P4
  • [10] INTERACTION OF POSITRON BEAMS WITH SURFACES, THIN-FILMS, AND INTERFACES
    SCHULTZ, PJ
    LYNN, KG
    [J]. REVIEWS OF MODERN PHYSICS, 1988, 60 (03) : 701 - 779