A COMPACT MICROCONTROLLER-BASED MEMS RATE INTEGRATING GYROSCOPE MODULE WITH AUTOMATIC ASYMMETRY CALIBRATION

被引：0

作者：

Gando, Ryunosuke ^{[1
]}

Ono, Daiki ^{[1
,2
]}

Kaji, Shiori ^{[1
]}

Ota, Hiroshi ^{[2
]}

Itakura, Tetsuro ^{[1
]}

Tomizawa, Yasushi ^{[1
,2
]}

机构：

[1] Toshiba Co Ltd, Corp Res & Dev Ctr, Tokyo, Japan

[2] Device & Syst Platform Dev Ctr Co Ltd, Kawasaki, Kanagawa, Japan

来源：

2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020) | 2020年

关键词：

MEMS; rate integrating gyroscope; microcontroller module; asymmetry calibration;

D O I：

10.1109/mems46641.2020.9056317

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the first microcontroller-based module-level MEMS rate integrating gyroscope (RIG) for direct angle measurement after automatic asymmetry calibration. The 5-cm prototype module integrates a vacuum-sealed donut-mass gyroscope device on analog and digital PCBs. In automatic calibration mode, the initial frequency and decay-time asymmetries are electrically tuned and reduced by >40 and >18 times, respectively. The sensing mode is enabled by built-in digital controls of vibration energy and frequency. Continuous angle measurement is confirmed with an angular random walk (ARW) of 0.6 deg/rt-h and a bias instability (BI) of 4.3 deg/h, proving comparable performances with previous FPGA-based large RIG systems. This module paves the way for RIG commercialization studies.

引用

页码：1296 / 1299

页数：4

共 6 条

[1] Gando R, 2018, PROC IEEE MICR ELECT, P944, DOI 10.1109/MEMSYS.2018.8346713
[2] Kaji S., 2020, P MEMS 2020
[3] Lynch DD., 1995, Proc. 2nd St. Petersburg Conf. on Gyroscopic Technology and Navigation, P26
[4] Prikhodko IP, 2017, PROC IEEE MICR ELECT, P323, DOI 10.1109/MEMSYS.2017.7863406
[5] Micromechanical Rate Integrating Gyroscope With Angle-Dependent Bias Compensation Using a Self-Precession Method
Taheri-Tehrani, Parsa
Challoner, Anthony Dorian
Horsley, David A.
[J]. IEEE SENSORS JOURNAL, 2018, 18 (09) : 3533 - 3543
[6] Tsukamoto T., 2018, INERTIAL 2018, P49

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