High-Q microfluidic cavities in silicon-based two-dimensional photonic crystal structures

被引:45
作者
Bog, Uwe [1 ]
Smith, Cameron L. C. [1 ]
Lee, Michael W. [1 ]
Tomljenovic-Hanic, Snjezana [1 ]
Grillet, Christian [1 ]
Monat, Christelle [1 ]
O'Faolain, Liam [2 ]
Karnutsch, Christian [1 ]
Krauss, Thomas F. [2 ]
McPhedran, Ross C. [1 ]
Eggleton, Benjamin J. [1 ]
机构
[1] Univ Sydney, Sch Phys, Ctr Ultrahigh Bandwidth Devices Opt Syst CUDOS, Sydney, NSW 2006, Australia
[2] Univ St Andrews, Sch Phys & Astron, St Andrews KY16 9SS, Fife, Scotland
基金
澳大利亚研究理事会;
关键词
D O I
10.1364/OL.33.002206
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate postprocessed microfluidic double-heterostructure cavities in silicon-based photonic crystal slab waveguides. The cavity structure is realized by selective fluid infiltration of air holes using a glass microtip, resulting in a local change of the average refractive index of the photonic crystal. The microcavities are probed by evanescent coupling from a silica nanowire. An intrinsic quality factor of 57,000 has been derived from our measurements, representing what we believe to be the largest value observed in microfluidic photonic crystal cavities to date. (C) 2008 Optical Society of America
引用
收藏
页码:2206 / 2208
页数:3
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