Sub-wavelength GaN-based membrane high contrast grating reflectors

被引：38

作者：

Wu, Tzeng Tsong ^{[1
,2
]}

Syu, Yu Cheng ^{[3
]}

Wu, Shu Hsien ^{[1
,2
]}

Chen, Wei Ting ^{[4
]}

Lu, Tien Chang ^{[1
,2
]}

Wang, Shing Chung ^{[1
,2
]}

Chiang, Hai Pang ^{[5
,6
]}

Tsai, Din Ping ^{[4
,7
,8
]}

机构：

[1] Natl Chiao Tung Univ, Dept Photon, Hsinchu 30050, Taiwan

[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 30050, Taiwan

[3] Natl Chiao Tung Univ, Inst Display, Hsinchu 30050, Taiwan

[4] Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10605, Taiwan

[5] Natl Taiwan Ocean Univ, Inst Optoelect Sci, Keelung 20245, Taiwan

[6] Acad Sinica, Inst Phys, Taipei 115, Taiwan

[7] Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan

[8] Acad Sinica, Res Ctr Appl Sci, Taipei 115, Taiwan

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 18期

关键词：

VCSEL; LASER;

D O I：

10.1364/OE.20.020551

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. (C) 2012 Optical Society of America

引用

页码：20551 / 20557

页数：7