Sub-wavelength GaN-based membrane high contrast grating reflectors

被引:38
|
作者
Wu, Tzeng Tsong [1 ,2 ]
Syu, Yu Cheng [3 ]
Wu, Shu Hsien [1 ,2 ]
Chen, Wei Ting [4 ]
Lu, Tien Chang [1 ,2 ]
Wang, Shing Chung [1 ,2 ]
Chiang, Hai Pang [5 ,6 ]
Tsai, Din Ping [4 ,7 ,8 ]
机构
[1] Natl Chiao Tung Univ, Dept Photon, Hsinchu 30050, Taiwan
[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 30050, Taiwan
[3] Natl Chiao Tung Univ, Inst Display, Hsinchu 30050, Taiwan
[4] Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10605, Taiwan
[5] Natl Taiwan Ocean Univ, Inst Optoelect Sci, Keelung 20245, Taiwan
[6] Acad Sinica, Inst Phys, Taipei 115, Taiwan
[7] Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan
[8] Acad Sinica, Res Ctr Appl Sci, Taipei 115, Taiwan
来源
OPTICS EXPRESS | 2012年 / 20卷 / 18期
关键词
VCSEL; LASER;
D O I
10.1364/OE.20.020551
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. (C) 2012 Optical Society of America
引用
收藏
页码:20551 / 20557
页数:7
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