Hybrid silicon free-space source with integrated beam steering

Free-space beam steering using optical phase arrays are desirable as a means of implementing Light Detection and Ranging (LIDAR) and free-space communication links without the need for moving parts, thus alleviating vulnerabilities due to vibrations and inertial forces. Implementing such an approach in silicon photonic integrated circuits is particularly desirable in order to take advantage of established CMOS processing techniques while reducing both device size and packaging complexity. In this work we demonstrate a free-space diode laser together with beam steering implemented on-chip in a silicon photonic circuit. A waveguide phased array, surface gratings, a hybrid III-V/silicon laser and an array of hybrid III/V silicon amplifiers were fabricated on-chip in order to achieve a fully integrated steerable free-space optical source with no external optical inputs, thus eliminating the need for fiber coupling altogether. The chip was fabricated using a modified version of the hybrid silicon process developed at UCSB, with modifications in order to incorporate diodes within the waveguide layer as well as within the III-V gain layer. Beam steering across a 12 degrees field of view with +/- 0.3 degrees accuracy and 1.8 degrees x0.6 degrees beam width was achieved, with background peaks suppressed 7 dB relative to the main lobe within the field of view for arbitrarily chosen beam directions.