A phenomenological model for the description of rotating spokes in HiPIMS discharges

被引:25
作者
Gallian, S. [1 ]
Hitchon, W. N. G. [2 ]
Eremin, D. [1 ]
Mussenbrock, T. [1 ]
Brinkmann, R. P. [1 ]
机构
[1] Ruhr Univ Bochum, Inst Theoret Elect Engn, D-44780 Bochum, Germany
[2] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA
关键词
D O I
10.1088/0963-0252/22/5/055012
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In the ionization region above circular planar magnetrons, well-defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. These regions are characterized by high plasma density and are often referred to as 'spokes'. Once their mode is stabilized, these structures rotate in the E x B direction with a constant rotation frequency in the hundreds of kHz range. A phenomenological model of the phenomenon is developed, in the form of a system of nonlinear coupled partial differential equations. The system is solved analytically in a frame co-moving with the structure, and its solution gives the neutral density and the plasma density once the electron density shape is imposed. From the balance of ionization, electron loss and constant neutral refilling, a steady-state configuration in the rotating frame is achieved for the electron and neutral densities. Therefore, the spoke experimentally observed can be sustained simply by the combination of this highly reduced number of phenomena. Finally, a study of the sensitivity of neutral and plasma densities to the physical parameters is also given.
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页数:8
相关论文
共 19 条
[1]   Self-organization and self-limitation in high power impulse magnetron sputtering [J].
Anders, Andre .
APPLIED PHYSICS LETTERS, 2012, 100 (22)
[2]   Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering [J].
Anders, Andre ;
Ni, Pavel ;
Rauch, Albert .
JOURNAL OF APPLIED PHYSICS, 2012, 111 (05)
[3]  
[Anonymous], 2005, PRINCIPLES PLASMA DI, DOI [10.1002/0471724254, DOI 10.1002/0471724254]
[4]   Measurement of the magnetic field change in a pulsed high current magnetron discharge [J].
Bohlmark, J ;
Helmersson, U ;
VanZeeland, M ;
Axnäs, I ;
Alami, J ;
Brenning, N .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (04) :654-661
[5]   High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization [J].
Ehiasarian, A. P. ;
Hecimovic, A. ;
de los Arcos, T. ;
New, R. ;
Schulz-von der Gathen, V. ;
Boeke, M. ;
Winter, J. .
APPLIED PHYSICS LETTERS, 2012, 100 (11)
[6]   CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT IONIZATION OF ATOMS [J].
FREUND, RS ;
WETZEL, RC ;
SHUL, RJ ;
HAYES, TR .
PHYSICAL REVIEW A, 1990, 41 (07) :3575-3595
[7]   High power impulse magnetron sputtering discharge [J].
Gudmundsson, J. T. ;
Brenning, N. ;
Lundin, D. ;
Helmersson, U. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (03)
[8]   SPUTTERING YIELD MEASUREMENTS WITH LOW-ENERGY METAL ION BEAMS [J].
HAYWARD, WH ;
WOLTER, AR .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (07) :2911-&
[9]  
Hecimovic A, 2013, ARXIV13055453
[10]  
Hecimovic A, 2013, COMMUNICATION