Enhanced light output in InGaN/GaN light emitting diodes with excimer laser etching surfaces

被引:6
作者
Huang, Hung-Wen
Chu, Jung-Tang
Kao, Chih-Chiang
Hsueh, Tao-Hung
Lu, Tien-Chang
Kuo, Hao-Chung
Wang, Shing-Chung [1 ]
Yu, Chang-Chin
Kuo, Shou-Yi
机构
[1] Natl Chiao Tung Univ, Dept Photon, Hsinchu 300, Taiwan
[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan
[3] TrueLight Corp, Hsinchu 300, Taiwan
[4] Highlink Corp, Hsinchu 300, Taiwan
[5] Instrument Technol Res Ctr, Natl Appl Res Labs, Hsinchu 300, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 4B期
关键词
gallium nitride (GaN); light-emitting diode (LED); excimer laser;
D O I
10.1143/JJAP.45.3442
中图分类号
O59 [应用物理学];
学科分类号
摘要
The InGaN/GaN light-emitting diode (LED) with a top p-GaN surface nanoroughened using Ni nanomasks and laser etching has been fabricated. The light output power of the InGaN/GaN LED with a nanoroughened top p-GaN surface is 1.55-fold that of a conventional LED. The series resistance of InGaN/GaN LED was reduced by 32% due to the increase in the contact area of the nanoroughened surface.
引用
收藏
页码:3442 / 3445
页数:4
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