[1] Beihang Univ, Sch Phys & Nucl Energy Engn, Beijing 100191, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Integrated Circuit Adv Proc Ctr, Beijing 100029, Peoples R China
[3] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices Integrated Technol, Beijing 100029, Peoples R China
[4] Beihang Univ, Minist Educ, Key Lab Micronano Measurement Manipulat & Phys, Beijing 100191, Peoples R China