Fabrication of three-dimensional photonic crystals with two-beam holographic lithography

被引：20

作者：

Liu, Y ^{[1
]}

Liu, S ^{[1
]}

Zhang, XS ^{[1
]}

机构：

[1] Xiamen Univ, Dept Phys, Xiamen 361005, Peoples R China

来源：

APPLIED OPTICS | 2006年 / 45卷 / 03期

关键词：

D O I：

10.1364/AO.45.000480

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A holographic technique used to fabricate three-dimensional photonic crystals with a two-beam interference method is presented. In the optical setup of fabrication one beam is incident on the recording plate in the direction of the plate normal and the other beam with an angle to the normal. Three exposures were taken. Between each exposure, the recording plate was rotated 120 degrees on axis until three exposures were completed. Good three-dimensional lattice structures have been obtained. Theoretical analysis, computer simulations, and experimental results are presented. (c) 2006 Optical Society of America.

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页码：480 / 483

页数：4

相关论文

共 13 条

[1] Formation of three-dimensional periodic microstructures by interference of four noncoplanar beams [J].

Cai, LZ ;

Yang, XL ;

Wang, YR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2002, 19 (11) :2238-2244

[2] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[3] Guided mode analysis, and fabrication of a 2-dimensional visible photonic band structure confined within a planar semiconductor waveguide [J].

Charlton, MDB ;

Roberts, SW ;

Parker, GJ .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 49 (02) :155-165

[4] Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography [J].

Divliansky, I ;

Mayer, TS ;

Holliday, KS ;

Crespi, VH .

APPLIED PHYSICS LETTERS, 2003, 82 (11) :1667-1669

[5] STRONG LOCALIZATION OF PHOTONS IN CERTAIN DISORDERED DIELECTRIC SUPERLATTICES [J].

JOHN, S .

PHYSICAL REVIEW LETTERS, 1987, 58 (23) :2486-2489

[6] A high-extraction-efficiency nanopatterned organic light-emitting diode [J].

Lee, YJ ;

Kim, SH ;

Huh, J ;

Kim, GH ;

Lee, YH ;

Cho, SH ;

Kim, YC ;

Do, YR .

APPLIED PHYSICS LETTERS, 2003, 82 (21) :3779-3781

[7] Experimental demonstration of guiding and bending of electromagnetic waves in a photonic crystal [J].

Lin, SY ;

Chow, E ;

Hietala, V ;

Villeneuve, PR ;

Joannopoulos, JD .

SCIENCE, 1998, 282 (5387) :274-276

[8] Three-dimensional face-centered-cubic photonic crystal templates by laser holography: fabrication, optical characterization, and band-structure calculations [J].

Miklyaev, YV ;

Meisel, DC ;

Blanco, A ;

von Freymann, G ;

Busch, K ;

Koch, W ;

Enkrich, C ;

Deubel, M ;

Wegener, M .

APPLIED PHYSICS LETTERS, 2003, 82 (08) :1284-1286

[9]

OZBAY E, 1994, APPL PHYS LETT, V64, P2059, DOI 10.1063/1.111736

[10] Three-dimensional photonic crystals based on macroporous silicon with modulated pore diameter [J].

Schilling, J ;

Müller, F ;

Matthias, S ;

Wehrspohn, RB ;

Gösele, U ;

Busch, K .

APPLIED PHYSICS LETTERS, 2001, 78 (09) :1180-1182