New silicon SPAD technology for enhanced red-sensitivity, high-resolution timing and system integration

被引:72
作者
Gulinatti, A. [1 ]
Rech, I. [1 ]
Panzeri, F. [1 ]
Cammi, C. [1 ]
Maccagnani, P. [2 ]
Ghioni, M. [1 ,3 ]
Cova, S. [1 ,3 ]
机构
[1] Politecn Milan, Dipartimento Elettron & Informaz, I-20133 Milan, Italy
[2] IMM CNR Sez Bologna, Bologna, Italy
[3] Micro Photon Devices MPD, Bolzano, Italy
关键词
single photon avalanche diode (SPAD); photon counting; photon timing; photon detection efficiency (PDE); TCSPC; quantum efficiency (QE); QUANTUM KEY DISTRIBUTION; AVALANCHE-DIODES; PHOTON;
D O I
10.1080/09500340.2012.701340
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper we present a new technology for the fabrication of Single Photon Avalanche Diodes (SPADs) aimed at combining the advantages of thin and thick SPADs. The new detector is manufactured in a thick epitaxial layer designed to improve the Photon Detection Efficiency (PDE) in the red and near-infrared range while maintaining a good timing resolution. Experimental characterization of the new red-enhanced SPAD (RE-SPAD) confirmed a significant improvement of the PDE compared with thin SPADs; for example the PDE at a wavelength of 800nm has increased from 15% to about 40%. Nevertheless the temporal resolution is still good, with a timing jitter of about 90 ps FWHM. In the same operating conditions the dark count rate is comparable with the one attainable with a thin SPAD (e. g. less than 25 cps for a 50 mu m diameter device cooled down to -5 degrees C). Moreover, being planar, the new technology is compatible with the fabrication of arrays of detectors.
引用
收藏
页码:1489 / 1499
页数:11
相关论文
共 39 条
[1]  
[Anonymous], PDM SER DAT
[2]  
[Anonymous], SPCM DAT
[3]   Photon-Timing Jitter Dependence on Injection Position in Single-Photon Avalanche Diodes [J].
Assanelli, Mattia ;
Ingargiola, Antonino ;
Rech, Ivan ;
Gulinatti, Angelo ;
Ghioni, Massimo .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2011, 47 (02) :151-159
[4]   AquEYE, a single photon counting photometer for astronomy [J].
Barbieri, C. ;
Naletto, G. ;
Occhipinti, T. ;
Facchinetti, C. ;
Verroi, E. ;
Giro, E. ;
Di Paola, A. ;
Billotta, S. ;
Zoccarato, P. ;
Bolli, P. ;
Tamburini, F. ;
Bonanno, G. ;
D'Onofrio, M. ;
Marchi, S. ;
Anzolin, G. ;
Capraro, I. ;
Messina, F. ;
Belluso, M. ;
Pernechele, C. ;
Zaccariotto, M. ;
Zampieri, L. ;
Da Deppo, V. ;
Fornasier, S. ;
Pedichini, F. .
JOURNAL OF MODERN OPTICS, 2009, 56 (2-3) :261-272
[5]  
Becker W., 2005, ADV TIME CORRELATED
[6]  
Belli S., 2010, IEEE International Symposium on Electrical Insulation, San Diego, CA, P1
[7]   Exciton lifetimes of CdTe nanocrystal quantum dots in high magnetic fields [J].
Blokland, J. H. ;
Claessen, V. I. ;
Wijnen, F. J. P. ;
Groeneveld, E. ;
Donega, C. de Mello ;
Vanmaekelbergh, D. ;
Meijerink, A. ;
Maan, J. C. ;
Christianen, P. C. M. .
PHYSICAL REVIEW B, 2011, 83 (03)
[8]   Ranging and three-dimensional imaging using time-correlated single-photon counting and point-by-point acquisition [J].
Buller, Gerald S. ;
Wallace, Andrew M. .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2007, 13 (04) :1006-1015
[9]   Analysis of detector performance in a gigahertz clock rate quantum key distribution system [J].
Clarke, Patrick J. ;
Collins, Robert J. ;
Hiskett, Philip A. ;
Garcia-Martinez, Maria-Jose ;
Krichel, Nils J. ;
McCarthy, Aongus ;
Tanner, Michael G. ;
O'Connor, John A. ;
Natarajan, Chandra M. ;
Miki, Shigehito ;
Sasaki, Masahide ;
Wang, Zhen ;
Fujiwara, Mikio ;
Rech, Ivan ;
Ghioni, Massimo ;
Gulinatti, Angelo ;
Hadfield, Robert H. ;
Townsend, Paul D. ;
Buller, Gerald S. .
NEW JOURNAL OF PHYSICS, 2011, 13
[10]   High-throughput FCS using an LCOS spatial light modulator and an 8 x 1 SPAD array [J].
Colyer, Ryan A. ;
Scalia, Giuseppe ;
Rech, Ivan ;
Gulinatti, Angelo ;
Ghioni, Massimo ;
Cova, Sergio ;
Weiss, Shimon ;
Michalet, Xavier .
BIOMEDICAL OPTICS EXPRESS, 2010, 1 (05) :1408-1431