Young's Modulus of High Aspect Ratio Si3N4 Nano-thickness Membrane

被引：0

作者：

Chen, Ping-Hei ^{[1
]}

Yang, Cheng-Hao ^{[1
]}

Tsai, Chien-Ying ^{[1
]}

Chang, Tien-Li ^{[1
]}

Hsu, Wei-Cheng ^{[2
]}

Chen, Ta-Chih ^{[2
]}

机构：

[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan

[2] Natl Ilan Univ, Dept Mech Engn, Ilan 26047, Taiwan

来源：

2007 7TH IEEE CONFERENCE ON NANOTECHNOLOGY, VOL 1-3 | 2007年

关键词：

Nano Membrane; Silicon nitride; Young's Modulus;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness membrane due to its nano-scale dimension. Currently, many potential applications for the nanoscale structures are not really practical because their mechanical properties have not been established. In this study, a suspended high aspect ratio silicon nitride nano-thickness membrane is fabricated by using silicon micro-machining. The membrane has a thickness of 30 nm and an area of 4 mm by 7 mm, as shown in Fig.1. Young's modulus of the silicon nitride nano-thickness membrane is determined from the deflection of the suspended membrane, which is resulted from the weight of membrane itself.

引用

页码：1071 / +

页数：3

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