InAs nano-ridges and thin films grown on (001) silicon substrates

被引:11
|
作者
Yan, Zhao [1 ]
Han, Yu [1 ]
Lau, Kei May [1 ]
机构
[1] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Clear Water Bay, Hong Kong, Peoples R China
关键词
SI; GAAS; INP;
D O I
10.1063/5.0011808
中图分类号
O59 [应用物理学];
学科分类号
摘要
Monolithic integration of InAs related devices on (001) Si platforms offers potential to extend integrated Si photonics to the mid-infrared (MIR). Here, we systematically studied the hetero-epitaxial growth of in-plane InAs nano-ridges and coalesced thin films on CMOS-standard (001) Si wafers. We started with the growth and optimization of in-plane InAs nano-ridges inside nano-scale Si trenches and developed a three-step growth procedure with a reduced growth rate to obtain uniform InAs nano-ridges with excellent crystalline qualities. We then developed a coalescence process for the optimized InAs nano-ridges to evolve into high quality continuous thin films. In the parametric growth study, we found that a low coalescence rate results in the formation of large InAs islands, while a high coalescence rate promotes the creation of uniform InAs thin films. These InAs/Si templates could serve as virtual substrates for the growth of light emitters and detectors in MIR Si photonics.
引用
收藏
页数:7
相关论文
共 50 条
  • [41] Diffusion processes in germanium and silicon films grown on Si3N4 substrates
    Arapkina, Larisa, V
    Chizh, Kirill, V
    Stavrovskii, Dmitry B.
    Dubkov, Vladimir P.
    Lazareva, Elizabeth P.
    Yuryev, Vladimir A.
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2021, 230 (230)
  • [42] All-MBE grown InAs/GaAs quantum dot lasers with thin Ge buffer layer on Si substrates
    Yang, Junjie
    Liu, Zizhuo
    Jurczak, Pamela
    Tang, Mingchu
    Li, Keshuang
    Pan, Shujie
    Sanchez, Ana
    Beanland, Richard
    Zhang, Jin-Chuan
    Wang, Huan
    Liu, Fengqi
    Li, Zhibo
    Shutts, Samuel
    Smowton, Peter
    Chen, Siming
    Seeds, Alwyn
    Liu, Huiyun
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2021, 54 (03)
  • [43] Epitaxial growth and orientation of AlN thin films on Si(001) substrates deposited by reactive magnetron sputtering
    Valcheva, E.
    Birch, J.
    Persson, P.O.A.
    Tungasmita, S.
    Hultman, L.
    Journal of Applied Physics, 2006, 100 (12):
  • [44] Characterization and kinetic investigation of electroless deposition of pure cobalt thin films on silicon substrates
    Cheng, S. L.
    Hsu, T. L.
    Lee, T.
    Lee, S. W.
    Hu, J. C.
    Chen, L. T.
    APPLIED SURFACE SCIENCE, 2013, 264 : 732 - 736
  • [45] Distinctions of the growth and structural-spectroscopic investigations of thin AIN films grown on the GaAs substrates
    Seredin, P. V.
    Kashkarov, V. M.
    Arsentyev, I. N.
    Bondarev, A. D.
    Tarasov, I. S.
    PHYSICA B-CONDENSED MATTER, 2016, 495 : 54 - 63
  • [46] Influence of Surface Structures on Quality of CdTe(100) Thin Films Grown on GaAs(100) Substrates
    Gu, Yi
    Zheng, Hui-Jun
    Chen, Xi-Ren
    Li, Jia-Ming
    Nie, Tian-Xiao
    Kou, Xu-Feng
    CHINESE PHYSICS LETTERS, 2018, 35 (08)
  • [47] Epitaxial characteristics of MBE-grown ZnTe thin films on GaAs (211)B substrates
    Ozceri, Elif
    Tarhan, Enver
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2019, 125 (11):
  • [48] Structural and ferromagnetic properties of InMnAs thin films including MnAs nanoclusters grown on InP substrates
    Yoshizawa, H.
    Toyota, H.
    Nakamura, S.
    Yamazaki, M.
    Uchitomi, N.
    THIN SOLID FILMS, 2017, 622 : 136 - 141
  • [49] Magnetization Damping in Nanocrystalline Yttrium Iron Garnet Thin Films Grown on Oxidized Silicon
    Krysztofik, Adam
    Ozoglu, Sevgi
    Coy, Emerson
    IEEE MAGNETICS LETTERS, 2021, 12
  • [50] High-resolution X-ray diffraction and micro-Raman scattering studies of Ge(:Ga) thin films grown on GaAs (001) substrates by MOCVD
    Liu, H. F.
    Jin, Y. J.
    Li, C. G.
    Dolmanan, S. B.
    Guo, S.
    Tripathy, S.
    Tan, C. C.
    RSC ADVANCES, 2016, 6 (58): : 52575 - 52582