Relationship between bias voltage and microstructure as well as properties of CrAlYN films

被引：3

作者：

Fu Ying-Ying ^{[1
,2
]}

Li Hong-Xuan ^{[1
]}

Ji Li ^{[1
]}

Liu Xiao-Hong ^{[1
]}

Liu Liu ^{[3
]}

Zhou Hui-Di ^{[1
]}

Chen Jian-Min ^{[1
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] Tianshui Normal Univ, Sch Life Sci Chem, Tianshui 741000, Peoples R China

来源：

CHINESE PHYSICS B | 2015年 / 24卷 / 11期

基金：

中国国家自然科学基金;

关键词：

CrAlYN film; bias voltage; microstructure; properties; CATHODIC ARC EVAPORATION; DIFFERENT SUBSTRATE BIAS; SPUTTERING P-CFUBMS; SI-N COATINGS; THIN-FILMS; OXIDATION RESISTANCE; TRIBOLOGICAL PROPERTIES; MECHANICAL-PROPERTIES; THERMAL-STABILITY; CR-1-XALXN FILMS;

D O I：

10.1088/1674-1056/24/11/116201

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this work, a series of CrAlYN films doped with 1 at.% yttrium were deposited by unbalanced reactive magnetron sputtering under different bias voltages. The effects of bias voltage on microstructure and properties of the CrAlYN films were subsequently investigated. It is found that all the as-deposited films have similar chemical composition and crystalline structure. However, the bias voltage has significant impact on the mechanical properties and oxidation resistance of the resulting films. Namely, the film deposited at 100 V has the highest hardness and best oxidation resistance, which are mainly attributed to its denser structure and higher Al content than others. In addition, the film obtained at 100 V exhibits superior oxidation resistance even at 1000 degrees C, and good friction and wear properties at 600 and 800 degrees C, and the latter two are mainly ascribed to the formation of compact transfer layer on the worn surfaces. However, this film experienced obvious wear loss at low testing temperatures (i.e., 200 and 400 degrees C) due to the serious abrasive wear.

引用

页数：10