Optical and micro-structural properties of ZnO thin films grown on silicon substrate by pulsed laser deposition

被引：0
|
作者：
He, JT [1 ]
Zhuang, HZ [1 ]
Xue, CS [1 ]
Tian, DS [1 ]
Wu, YX [1 ]
Xue, SB [1 ]
Hu, HJ [1 ]
机构：
[1] Shandong Normal Univ, Coll Phys & Elect, Inst Semicond, Jinan 250014, Peoples R China
来源：
JOURNAL OF RARE EARTHS | 2006年 / 24卷
关键词：
PLD; ZnO; substrate temperature; oxygen pressure;
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
ZnO thin films were deposited on n-Si (111) at various substrate temperatures and oxygen pressures by pulsed laser deposition (PLD) using a Nd:YAG laser with the wavelength of 1064 nm. X-ray diffraction (XRD), photoluminescence (PL), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) were used to analyze the microstructure, optical property and morphology of the ZnO thin films. A comparatively optimal crystallized ZnO thin film was obtained at the substrate temperature of 600 degrees C in oxygen pressure of 50 mTorr. The intensity of the luminescence strongly depends on the stoichiometry of the film as well as the crystalline quality.
引用
收藏
页码：26 / 28
页数：3
相关论文
共 50 条
  • [41] Characterization of AlN Thin Films Grown by Pulsed Laser Deposition on Sapphire Substrate
    Jeong, Eun-Hee
    Chung, Jun-Ki
    Jung, Rae-Young
    Kim, Sung-Jin
    Park, Sang-Yeup
    JOURNAL OF THE KOREAN CERAMIC SOCIETY, 2013, 50 (06) : 551 - 556
  • [42] Influence of oxygen pressure on the structural, electrical and optical properties of Nb-doped ZnO thin films prepared by pulsed laser deposition
    Wu, Muying
    Yu, Shihui
    He, Lin
    Zhang, Geng
    Ling, Dongxiong
    Zhang, Weifeng
    APPLIED SURFACE SCIENCE, 2014, 292 : 219 - 224
  • [43] Structural and optical characterization of AlN films grown by pulsed laser deposition
    Ristoscu, C
    Ducu, C
    Socol, G
    Craciunoiu, F
    Mihailescu, IN
    APPLIED SURFACE SCIENCE, 2005, 248 (1-4) : 411 - 415
  • [44] Structural, electrical, and optical properties of germanium-doped ZnO thin films deposited by pulsed laser deposition technique
    Shan, F. K.
    Liu, G. X.
    Lee, W. J.
    Shin, B. C.
    Kim, K. H.
    INTEGRATED FERROELECTRICS, 2008, 98 : 199 - 207
  • [45] The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition
    Zhu, B. L.
    Sun, X. H.
    Zha, X. Z.
    Su, F. H.
    Li, G. H.
    Wu, X. G.
    Wu, J.
    Wu, R.
    Liu, J.
    VACUUM, 2008, 82 (05) : 495 - 500
  • [46] Properties of ZnO thin films grown on Si substrates in vacuum and oxygen ambient by pulsed laser deposition
    Zhao, Jie
    Hu, Lizhong
    Liu, Weifeng
    Wang, Zhaoyang
    APPLIED SURFACE SCIENCE, 2007, 253 (14) : 6255 - 6258
  • [47] Influence of the substrate temperature on the optical and electrical properties of Ga-doped ZnO thin films fabricated by pulsed laser deposition
    Hyun Ho Shin
    Yang Hee Joung
    Seong Jun Kang
    Journal of Materials Science: Materials in Electronics, 2009, 20
  • [48] Optical and hall properties of Al-doped ZnO thin films fabricated by pulsed laser deposition with various substrate temperatures
    Seong Jun Kang
    Yang Hee Joung
    Journal of Materials Science: Materials in Electronics, 2013, 24 : 1863 - 1868
  • [49] Optical and photoconductivity properties of ZnO thin films grown by pulsed filtered cathodic vacuum arc deposition
    Kavak, H.
    Tuzemen, E. Senadim
    Ozbayraktar, L. N.
    Esen, R.
    VACUUM, 2008, 83 (03) : 540 - 543
  • [50] Structural and optical properties of Zn1-xMgxO films grown by pulsed laser deposition
    Krishnaprasad, P. S.
    Ragitha, E. K.
    Jayaraj, M. K.
    ADVANCES IN THIN-FILM COATINGS FOR OPTICAL APPLICATIONS V, 2008, 7067
12345