Preparation and characterization of a sol-gel prepared ferroelectric sandwich structure

被引:5
作者
Ren, TL [1 ]
Zhang, LT [1 ]
Liu, LT [1 ]
Li, ZJ [1 ]
机构
[1] Tsing Hua Univ, Inst Microelect, Beijing 100084, Peoples R China
关键词
PZT; PT; sandwich structure; sol-gel; ferroelectric properties;
D O I
10.1023/A:1015361413911
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A novel silicon-based PbTiO3/Pb(Zr,Ti)O-3/PbTiO3 (PT/PZT/PT) sandwich structure has been prepared using a sol-gel method. The annealing temperature is greatly reduced compared with those structures without PT layers. Capacitance-voltage (C-V), leakage current-voltage (I-V), polarization-field (P-E), dielectric-frequency response and polarization fatigue of the sandwich structure are examined. The relative dielectric constant, the coercive field and the remanent polarization of the PZT films are measured to be about 900, 18 kV/cm and 16 muC/cm(2) respectively. The current density is less than 5 x 10(-9) A/cm(2) below 200 kV/cm. The dielectric constant of the structure remains constant at low frequency, and decreases to some degree at high frequency. The retained polarization does not change significantly after 8 x 10(9) read/write cycles. The PZT films are proved to have very good dielectric and ferroelectric properties. The new PT/PZT/PT sandwich structure can be valuable for memory devices and other applications.
引用
收藏
页码:271 / 274
页数:4
相关论文
共 50 条
[21]   Selective sample preparation with bioaffinity columns prepared by the sol-gel method [J].
Cichna-Markl, Margit .
JOURNAL OF CHROMATOGRAPHY A, 2006, 1124 (1-2) :167-180
[22]   Preparation and characterization of eugenol-loaded oligochitosan nanoparticles through sol-gel and emulsion/sol-gel methods [J].
Shahriari, Mehrnoosh Hasan ;
Atai, Mohammad ;
Zandi, Mojgan ;
Shokrollahi, Parvin ;
Solhi, Laleh .
POLYMER BULLETIN, 2018, 75 (07) :3035-3051
[23]   Preparation and characterization of sol-gel derived PZT thin films for micro actuators [J].
Wang, ZJ ;
Maeda, R ;
Kikuchi, K .
DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 :948-955
[24]   Structure and dielectric behavior of nano-structure ferroelectric BaxSr1-xTiO3 prepared by sol-gel method [J].
Mahani, R. M. ;
Battisha, I. K. ;
Aly, M. ;
Abou-Hamad, A. B. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 508 (02) :354-358
[25]   Preparation and characterization of porous hydrogen silsesquioxane by sol-gel process [J].
Cheng, Yao-Yi ;
Chang, Chen-Jung ;
Chang, Chaung-Chih ;
Peng, Kuey-Ming ;
Dai, Chi-An .
SCIENCE AND TECHNOLOGY OF HYBRID MATERIALS, 2006, 111 :115-118
[26]   Preparation and characterization of ultra-thin sol-gel films [J].
Shapiro, Leora ;
Marx, Sharon ;
Mandler, Daniel .
THIN SOLID FILMS, 2007, 515 (11) :4624-4628
[27]   Optical and Electrical Properties of Ferroelectric SBN Thin Films Prepared by Sol-Gel Process [J].
Junmo Koo ;
Jae Hyeok Jang ;
Byeong-Soo Bae .
Journal of Sol-Gel Science and Technology, 2000, 19 :611-614
[28]   Optical and electrical properties of ferroelectric SBN thin films prepared by sol-gel process [J].
Koo, J ;
Jang, JH ;
Bae, BS .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2000, 19 (1-3) :611-614
[29]   PREPARATION AND CHARACTERIZATION OF FLUOROHYDROXYAPATITE NANOPOWDERS BY NONALKOXIDE SOL-GEL METHOD [J].
Darroudi, Majid ;
Eshtiagh-Hosseini, Hossein ;
Housaindokht, Mohammad Reza ;
Youssefi, Abbas .
DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 2010, 5 (01) :29-33
[30]   Preparation and characterization of pure anatase nanocrystals by sol-gel method [J].
Liu, Xiangchun .
POWDER TECHNOLOGY, 2012, 224 :287-290