Application of power spectral density to specify optical super-smooth surfaces

被引：2
|
作者：
Liu, YH [1 ]
Teng, L [1 ]
Li, DQ [1 ]
Zhang, X [1 ]
机构：
[1] Flight Automat Control Res Inst, Xian 710065, Peoples R China
来源：
2ND INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, PTS 1 AND 2 | 2006年 / 6150卷
关键词：
power spectral density; optical super-smooth surface; atomic force microscope; mirror substrate;
D O I：
10.1117/12.676477
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The power spectral density (PSD) is an appropriate way to specify the optical super-smooth surfaces. The reasons to characterize the super-smooth surfaces using the PSD are discussed. Some super-smooth mirror substrates obtained by different process methods are measured with an atomic force microscope (AFM). The measured optical surfaces are characterized by the PSD. The result shows that the PSD is of great guidance to the selection of manufacturing methods and process improvement.
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页数：5
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